Innovation makes future

PROCESS
EQUIPMENT

Diffusion Furnace
LPCVD/PECVD
Custom Solutions

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SYSTEM
COMPONENTS

Bubbler
EBS
Gas Panels
Control System

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FACILITY
SYSTEM

Gas Cabinets
Valve Manifold Box
Chemical Delivery
Total solution

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Where tradition meets technology

SVGS Process Innovation designs and manufactures batch horizontal furnaces for the semiconductor and photovoltaic industry. The furnaces, both for atmospheric and LPCVD processes are outstanding because of the quality of selected components, long term experience of our engineers, and competitive prices.

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